JPH0228603Y2 - - Google Patents

Info

Publication number
JPH0228603Y2
JPH0228603Y2 JP1983045062U JP4506283U JPH0228603Y2 JP H0228603 Y2 JPH0228603 Y2 JP H0228603Y2 JP 1983045062 U JP1983045062 U JP 1983045062U JP 4506283 U JP4506283 U JP 4506283U JP H0228603 Y2 JPH0228603 Y2 JP H0228603Y2
Authority
JP
Japan
Prior art keywords
electrode
screw
multipolar
male screw
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983045062U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59150154U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4506283U priority Critical patent/JPS59150154U/ja
Publication of JPS59150154U publication Critical patent/JPS59150154U/ja
Application granted granted Critical
Publication of JPH0228603Y2 publication Critical patent/JPH0228603Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4506283U 1983-03-29 1983-03-29 多極電極 Granted JPS59150154U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4506283U JPS59150154U (ja) 1983-03-29 1983-03-29 多極電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4506283U JPS59150154U (ja) 1983-03-29 1983-03-29 多極電極

Publications (2)

Publication Number Publication Date
JPS59150154U JPS59150154U (ja) 1984-10-06
JPH0228603Y2 true JPH0228603Y2 (en]) 1990-07-31

Family

ID=30175584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4506283U Granted JPS59150154U (ja) 1983-03-29 1983-03-29 多極電極

Country Status (1)

Country Link
JP (1) JPS59150154U (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853021Y2 (ja) * 1978-08-31 1983-12-02 日本電子株式会社 多極電極

Also Published As

Publication number Publication date
JPS59150154U (ja) 1984-10-06

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